Simulation Study Of Electrochemical Deposition And Photo-Electrochemical Composition Deposition With COMSOL Analysis Software

With the development of micro-electro-mechanical system(MEMS),the demand for the manufacture of small and complex parts is increasing.The micro fabrication technology as a key technology to achieve the machining of micro level parts has grabbed great attention from the domestic and foreign scholars.Micro electrochemical deposition technology has the advantages of high manufacturing precision,good process flexibility and low cost.However,due to its slow deposition rate,poor deposition localization,low deposition quality and other defects,the development and application of micro-electrochemical deposition technology has been limited.Laser electrochemical composite deposition technique is a multi-energy field hybrid deposition technique which combines laser energy with electrochemical energy effectively,can not only improve the deposition rate but also improve the deposition localization and deposition quality.As the laser electrochemical composite deposition is a complex multi-physical field coupling process,which involves the coupling of electric field,temperature field and flow field,it is very difficult to study the complex processing mechanism by traditional methods.Therefore,in order to analyze the promotion mechanism of laser to the electrochemical deposition rate,the finite element analysis software was used to simulate the process of the electrochemical deposition and photo-electrochemical hybrid deposition.Firstly,the micro-electrochemical deposition rate was studied and the effects of potential,ion concentration,flow rate and other process parameters on the deposition rate were simulated.And in order to solve the problem that the deposition rate is difficult to be determined,a neural network model was established to calculate the deposition rate.Subsequently,the effect of thermal,strong agitation and shock of laser were studied,and the distribution of temperature,flow field and stress impact were simulated.Finally,the electric field,temperature field and flow field in laser electrochemical composition deposition were simulated,and the influences of the effect of thermal and strong agitation of laser on electrochemical deposition rate were studied.The main research contents are as follows:1.The mechanism of electrochemical deposition and the effect of thermal,strong agitation and stress shock of laser on electrochemical reaction were studied.The simulation model of micro electrochemical deposition was established,and the influences of process parameters such as potential,ion concentration,electrode gap,temperature and flow rate etc.on electrochemical deposition rate were studied.The formation of ion scarcity zone and its effect on the deposition rate were emphatically researched.2.A reliable neural network model was established to calculate the deposition rate,and the quantitative analysis and parameter optimization of deposition rate were realized with the help of genetic algorithm.The calculation software of optimization of deposition rate parameters was designed,which reduces the difficulty of using the program and provides the software foundation for the future electrochemical deposition processing.3.The physical model,mathematical model and finite element model of laser electrochemical composite deposition were established,and the effect of thermal,strong agitation and stress impact of laser were simulated respectively.The electric field,temperature field and flow field were coupled analyses,the geometrical shape of the cavity was simulated and the influences of the function of laser on the electrochemical deposition rate,concentration distribution and deposition height were studied.The simulation study of the deposition rate is beneficial for the study of the electrochemical deposition mechanism,and the establishment of the neural network overcame the difficulty of the analysis of the deposition rate.The simulation study is helpful to understand the mechanism of photo-electrochemical composition deposition.Applying the beneficial effect of multi-field coupling simulation results can further improve the deposition rate,deposition localization and deposition quality,greatly promoting the further development of the photo-electrochemical composition technology.