Research On Macro/Micro Dual Drive Micro-cutting Positioning And Feeding System

Large-stroke and high-precision positioning and feeding system has a wide range of applications in vibration testing,weapon assembly,aerospace,IC manufacturing,MEMS manufacturing,precision optical instruments and other fields.With the rapid development of precision machining technology,the relationship between the two elements of stroke and precision is highlighted in the traditional single drive mode.The positioning and feeding method with macro/micro dual drive can effectively solve the technical problem for large travel and high precision.It not only has the characteristics of fast moving and long-distance transmission of macro-drive stage,but also has the micro-drive stage's advantages of high precision,quick response,small volume and so on.These provide a good solution for precision and high precision machining,and promote the development of science and technology.In this paper,it is based on the National Natural Science Foundation of China,the meso scale cutting mechanism and the structural integrity of the microstructure of porous titanium alloy which are used as bone-implant(Code:51305174).In addition,according to the current research findings of the macro/micro dual drive positioning feed system,a design scheme of double stack macro/micro two stage drive positioning and feeding system is put forward.In the scheme,the macro-motion platform is driven by linear motor,and the measurement and feedback are realized by grating ruler.The micro platform is driven by PZT piezoelectric ceramic and flexible hinge,and the precision of the system is measured by laser interferometer.What's more,the micro drive platform is superimposed on the macro drive platform,and a large stroke is moved along with the macro drive platform.In the design of the control system,Gugao is used to control the two-dimensional motion in the macro motion platform,while the development of the output voltage control system is based on the HSPY precision adjustable power RS232 transmission standard in the micro platform.Moreover,according to the error testing and feedback information,a coordinated control systems for macro/micro dual drives was developed.This system can realize single channel drive,dual drive and error compensation.In the design of the micro drive platform,the structural optimization design of theflexure hinge,micro platform and the whole micro drive platform is carried out.What's more,the piezoelectric properties of piezoelectric ceramics are verified by experiments.Based on the analysis of the characteristics of flexible hinges,the paper puts forward the method of using elastic plastic(ABS)to 3D printing instead of the traditional flexible hinge.The mechanical model,the output and output characteristics of the micro platform are studied,and the finite element simulation and analysis of the static and modal characteristics are carried out by ANSYS.Finally,the macro/micro dual drive positioning and feeding system prototype is built,and the accuracy and error analysis of the double drive system are analyzed.Based on those,the BP neural network error compensation model is established,and the dynamic modeling and the repetitive positioning accuracy measurement of the double drive system are carried out.The final designed itinerary is 230 mm ?265mm and the positioning accuracy of machine is 10 nm,the output load is ?20N.Therefore,the design meets the requirements of precision machining and manufacturing technology of artificial bones which are made by porous titanium alloys.