Experimental Study On Preparation Of Metal Structures By Micro Electrodeposition Assisted By Capillary Tube

Micro machining has important application prospects and broad in many industrial fields.When the metal process reach the nanometer scale,there will be some new effects such as quantum size effect,small size effect and macroscopic quantum tunneling effect.These effects often play roles at the same time,resulting in thermal,optical,electrical,magnetic,and chemical properties of nano materials are different from corresponding bulk materials.Based on the existing processing technology,this paper proposes the using of capillary assisting micro electrodeposition preparation method of metal structures.The method to design the microelectrode as anode electrodeposition reaction,combined with micro local electrodeposition and the metal micro structures can be prepared quickly and simply.The main content of the research are as follows:(1)proposing capillary assisting micro electrodeposition preparation and processing method of metal structures.The method is using glass capillary tube as insulation device,micro platinum wire inserted inside capillary tube and the bottom opening flush as anode.(2)Using COMSOL Multiphysics simulation software simulate the electric field of the micro electrodeposition.According to not set insulation device and a insulation device(capillary)simulation study of two kinds of physical model,theoretically verify the feasibility of capillary assisting micro electrodeposition to prepare metal structures.(3)Design and build a test system platform for micro processing by capillary assisting micro electrodeposition.To complete the design of the core electrodeposition processing unit,automatic control of the stepping system and the use of CCD monitoring system for real-time monitoring of the deposition process in order to adjust the process parameters timely.(4)For the optimization of process parameters of fine metal structure growth,in the preparation of micro metal cylinder as an example.Respectively from the working voltage of pulse power and duty ratio of two processing parameters for processing test to get the optimum process parameters of preparation of copper cylinder.On the basis of this study,the preparation process according to the optimum parameter the preparation of micro copper cylinder to further guide the other micro metal structures,and thus obtain different micro metal structures.