Structure Design And Process Preparation Of One-dimensional MEMS Vector Hydrophone

Based on the MEMS technology and bionics principle,MEMS vector hydrophone performs a good application prospect in the field of underwater acoustic detection due to its characteristics of low cost,small volume and vector property.Moreover,it only needs one-dimensional vector hydrophone in many fields,such as deep-water bomb which only needs to detect the target information of the sinking direction and suppress the interference information of other directions as well as stethoscope(a digital diagnostic instrument)which only needs to pick up physiological information of the body direction.Therefore,on the basis of previous studies,this paper focuses on the research of one-dimensional MEMS vector hydrophone.In this paper,based on bionics principle,hydrophone propagation theory and the level of domestic MEMS processing,a novel one-dimensional MEMS vector hydrophone microstructure is designed and the theoretical model of microstructure is established.Then,the microstructure parameters are optimized and the optimal parameter solution is obtained by using ANSYS workbench simulation software.The microstructure is also analyzed by finite element simulation.Moreover,based on the optimal dimension of one-dimensional microstructure,the specific preparation process of the chip is discussed and designed.L-edit software is used to design and draw the layout of one-dimensional microstructure.In the preparation process,every process steps and problems in process flow have corresponding explanation.And the key processed are discussed and tested in turn.Finally,the microstructure of one-dimensional MEMS vector hydrophone chip is obtained.Finally,the one-dimension MEMS vector hydrophone chip is tested.The test results show that the chip size and shape are intact,the structure is movable and the consistency of the varistor is acceptable,which verifies the rationality of the process design and the feasibility of the preparation process.It also accumulated process preparation experience for further development of subsequent MEMS devices.