Research Of Thickness Detection System Based On Spectral Confocal

With the rapid development of high-end precision manufacturing,all kinds of transparent panels are widely used in industrial,scientific research,building and aerospace fields,and the demand of market for products is increasing.Meanwhile,the standard of product quality is also improving.As an important factor affecting the quality of all kinds of transparent sheet products,thickness has also been paid much attention by manufacturers.The detection technology of all kinds of transparent sheet thickness has also been a research hotspot.At present,the non-contact detection system for thickness generally has high speed and precision,overcomes many disadvantages of the contact,but at the same time,they also have some difficult to overcome the inherent limitations,such as the requirement of measuring angle,of the element to be measured surface roughness and cleanliness requirements,and to measure distance requirements and so on,these limitations restrict the popularization of industrial detection means.At present,the non-contact detection system for thickness generally has high speed and precision,overcomes many disadvantages of contact detection,but at the same time,they also have some difficult to overcome the inherent limitations,such as the requirement of measuring angle,of the element to be measured surface roughness and cleanliness requirements,as well as on distance measurement requirements and so on,these limitations restrict the popularization of industrial detection methods.The spectral confocal thickness detection technology research in this paper is a novel technology,which uses the spectral confocal principle,establish the corresponding relationship between the focusing distance and wavelength dispersion of optical spectrum,decoding the position information is obtained through a spectral detector.The technology overcomes many limitations of the existing detection system,and its detection precision can reach the magnitude of micron.Moreover,the spectral confocal technology uses the complex color light source,so it has the characteristics of multi surface tomography.Besides measuring the thickness of quartz glass and other materials accurately,it can also measure the thickness of plastic plates,metal thin films and all kinds of optical elements.In addition,because the system adopts coaxial optical structure,the optical structure can be simplified,miniaturization and integration as much as possible,and at the same time,the shelter of light path is effectively avoided,and the availability of light source is enhanced,which can meet the requirements of modern industry.Using the spectral confocal thickness detection system proposed in this paper,we can achieve high precision thickness detection for transparent panels,the detection range is about 1mm,and the detection accuracy is within 0.005mm.Through the use of the experimental prototype,it is found that the thickness detection system based on the spectral confocal technology can be fully competent for high-speed and high-precision lossless on-line detection.It has high practical value and better industrial application prospects.