| Atmospheric pressure plasma micro-jet is a kind of micro-plasma produced in the form of jet in atmospheric pressure and open space with characteristic scale less than 1 mm.It has the advantages of high density of active particles,low temperature,simple structure,easy operation and processing of three-dimensional complex samples,besides the conventional size(mm?cm),atmospheric pressure plasma jet is limited by plasma.Smaller regions can be directly processed in small areas of samples or single cells,so they have great potential in the fields of micro-electromechanical systems(MEMS)and biomedicine.However,the efficiency of single micro-jet treatment is low,and the micro-jet array composed of multiple micro-jets can greatly improve the processing efficiency.In order to understand the generation mechanism of micro-jet and its array,and to make it have better processing effect by optimizing the device and adjusting the working parameters,it is particularly important to study the discharge characteristics of micro-jet and its array.However,the current research mainly focuses on the atmospheric plasma jet and its arrays of conventional size,while the discharge characteristics of micro-jet and micro-jet arrays are very few.Based on the above research background,this paper studies the influence of different discharge parameters on the discharge characteristics of micro-jet and micro-jet arrays on the basis of the atmospheric pressure plasma micro-jet and array generator proposed by our research group,and provides important guidance and help for future specific applications.The main contents of this paper are as follows:COMSOL simulation software were used to simulate the micro-jet generator,and the effects of different discharge parameters on the plasma micro-jet were studied and analyzed.Combined with the actual situation,the atmospheric pressure plasma microjet generator is optimized,which provides a good basis for subsequent experiments.High-speed schlieren photography was used to analyze the flow field of plasma micro-jet and micro-jet array.The effects of discharge voltage and gas flow rate on the flow field characteristics of micro-jet were analyzed,and the effects of gas flow rate and excitation voltage on the spatial uniformity of micro-jet arrays were analyzed.The effects of different discharge parameters and working conditions,such as oxygen content,voltage amplitude,sample spacing,on the size,depth,morphology and surface quality of etching holes were studied by etching experiments with micro-jet and micro-jet arrays,which laid a foundation for the practical application of micro-jet and micro-jet arrays. |
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