Excitation And Optical Properties Of Surface Phonon Polariton On SiC

In recent years,the research on surface plasmon polariton?SPPs?has attracted great attention and eventuly developed a new reseach field:Plasmonics.However,the inherent optical loss of electrons limit the lifetime of SPPs in metals?such as gold,silver,copper?,resulting in the research and application of SPPs mainly in the ultraviolet to near-infrared wavelengths.Comparing to SPPs,surface phonon polaritons?SPhPs?are collective oscillations of lattices at the surface of polar crystals driven by the external EM fields.The excelent properties of SPhPs,such as low loss,long life,and high Q factor,offer great opportunities in the applications in long wavelengths?e.g.,middle and far infrared?.In general,excitation of SPhPs is achieved in polar materials,such as SiC,GaN,GaAs and SiO₂,which have a Reststrahlen band?in a range of constrained frequencies between Transverse optical phonons and longitudinal optical phonons?over long wavelengths.SPhPs show a promising perspertives in fields of sensors,photoacoustic detection,thermal radiation source,surface spectral enhancement and strong coupling research.In this thesis,an one-dimensional grating structure is prepared by etching process on SiC and?-SiO₂ surfaces.The excitation of high-Q SPhPs were successful y realized in the mid-infrared region and the effect of grating structural parameters on the optical properties of SPhPs were systematicaly studied.The effects of two-dimensional grating structural parameters on the optical properties of SPhPs are studied as wel.The main content of the thesis is presented as follows:1)Using the lithography technique,magnetron sputtering technology,stripping technology and etching technology,one-dimensional grating structure is prepared on the surface of polar materials SiC and?-SiO₂,respectively,exciting the SPhPs successfuly.The origin of different SPhPs modes is analyzed by changing the grating structural parameters of the SiC caluating by CST simulation.2)The optical properties of SPhPs are studied by changing structural parameters such as the period,depth,grating channel width,incident angle and dielectric layer thickness of SiC.The optimal conditions of SPhPs with high Q factor are obtained.By using the sensitivity of high Q SPhPs to the environments,an infrared nanometer ruler was discussed and developed.3)The optical properties of SPhPs were studied by changing the period and angle of incidence of?-SiO₂ one-dimensional grating structure and the high Q factor of SPhPs mode is obtained.4)Different two-dimensional grating structures of SiC were prepared.The optical properties of SPhPs were studied by changing the shape,depth,period and light incident angle and the high Q factor of the excitation mode was obtained.