Design And Application Of DIC Microscopy In Detection Of Total Internal Reflected Sub-surface Damage

The subsurface damage of optical components will seriously affect the performance and reduce the service life of the optical system,and even cause serious accidents,which restrict the development of laser,energy,aerospace and other fields,so the sub surface damage of optical element detection is significant.There are some shortcomings in the existing detection techniques,among which the total internal reflection measurement technology is attracting the attention of scholars both at home and abroad,but it is limited by the low vertical resolution.In order to change this shortcoming,the system is incorporated into DIC,which makes use of DIC to make up the deficiency of total internal reflection measurement technology on the characteristics of high resolution in the longitudinal phase depth.Therefore,DIC has important research value in the non contact and non contact detection of the sub surface damage of transparent optical parts.In this paper based on total internal reflection microscopy field superimposed on the DIC according to the theory and implementing method.The ray tracing of the DIC system,especially the light path of the important parts of the Nomarski prism is theoretically deduced,and using the Matlab mathematical software and optical software Oslo two software were prepared independently of the optical simulation program,mutual authentication.And the tolerance of the relevant parameters of Nomarski prism is analyzed in order to guide the actual processing and manufacturing.Then,how to measure and control the tolerance in the process of the actual prism is discussed in detail.On the basis of the original total internal reflection microscope system,the new system is added to DIC,and the three methods of measuring phase are given,and the advantages and disadvantages are compared.The introduction of DIC can improve the resolution of the original system,and can quantitatively measure the longitudinal depth phase information of the sub surface damage point to a certain extent.