The Structure Optimization And Applied Research Of Piezoelectric Spray Nozzle

With the rapid development of industrial technologies represented by semiconductor materials,microelectronics and optoelectronics,advanced technology in preparing film is an important foundation for the production of high-quality semiconductor materials and microelectronic devices,which can play an important role in promoting the development of these industry technologies.On the other hand,piezoelectric spray nozzle technology has many advantages over the traditional thin-film coating technology,such as uniformity,high efficiency,controllability,etc.This also provides a new direction for the further development of thin film preparation technology.Piezoelectric atomizing nozzles are the core components of piezoelectric atomizing spraying technology.The research and development technology of highperformance piezoelectric atomizing nozzles has been monopolized by foreign countries,which is extremely unfavorable to the revitalization and development of the national industry.Therefore,it is very important to master the core development technology of highperformance piezoelectric atomizing nozzles,and it is of far-reaching significance for the development of domestic film coating and related fields.Based on this situation,a 40 k Hz piezoelectric atomizing nozzle with a half-wavelength sandwich structure was designed.The nozzle has a low driving voltage,high work efficiency,soft mist impact,stable atomization effect,uniform atomization,and coating.Through the design and application of this nozzle,its key development technology has been initially mastered.On the design of piezoelectric atomizing nozzles,this paper proposes a stepped exponential horn scheme with a circular arc section,which is applied in the design of piezoelectric atomizing nozzles,combined with the characteristics of larger displacement amplification coefficients of stepped horns in piezoelectric atomizing nozzles and the uniform stress distribution of exponential horns.The boundary conditions of each section of the vibration system of the piezo are used to derive the frequency equation and resonance length of the specified section.Based on the frequency equation and the parameters of the piezoelectric crystal array,the resonant length was deduced,and the effective structural parameters of the piezoelectric sprinkler vibration system were obtained.The structural model of the piezoelectric sprinkler vibration system we obtained in the theoretical design was analyzed by modal analysis and harmonic analysis in ANSYS finite element.The piezoelectric sprinkler vibration system resonant frequency was 39530 Hz,and the atomized surface amplitude was 3.85?m when the driving voltage was 26 V.On the performance test of the piezoelectric atomizing nozzle,the actual resonant frequency of the atomizing nozzle was measured to be 39920 Hz by using the impedance analyzer PV520 A,which is less than 1% of the theoretical design frequency.The amplitude of the atomizing surface of the piezoelectric atomizing nozzle is measured by the OFV-505/5000 high-performance laser vibrometer and the amplitude measurement is 3.6?m.The difference between amplitude measurement and the results we obtained through harmonic analysis is 5%.The atomization test was performed on the piezoelectric atomizing nozzle,and the atomization results were statistically analyzed by the Malvern laser particle size analyzer.When the driving voltage was 26 V,the droplet diameter generated by the atomization of the nozzle was between 30 and 73?m,which accounted for 62.98%.The droplet distribution is relatively uniform.In addition,the thermal performance of the nozzle we designed in this paper is not obvious,and it also further validates the higher working efficiency and reasonable structure of the piezoelectric atomizing nozzle.On the application research of piezoelectric atomization spray coating,the piezoelectric atomization nozzle we designed was applied to the process to fabricate flexible transparent conductive silver nanowire film.The corresponding process flow of piezoelectric atomized spray coating was designed,and the effect of the preparation conditions on the performance of the transparent conductive silver nanowire film was analyzed and compared experimentally.Nearly optimal spraying process parameters of silver nanowire film were analyzed.A high-performance transparent conductive film was prepared by the optimized process parameters,and the film had good comprehensive photoelectric properties,uniformity,and flexibility.Therefore,the piezoelectric atomization spray method has a high value in the application to fabricate transparent conductive silver nanowire film.