| Transparent conductive films have been widely used in solar cells,electromagnetic shielding,light and display and other fields.At present,tin doped indium oxide?ITO?film is the dominant transparent conductive film.However,due to the increasing price of indium and the mechanical brittleness of ITO,it has been unable to meet the market demand for flexible transparent conductive material.Therefore,it is necessary to develop the new materials or structures.The sandwich structure?Dielectric/Metal/Dielectric?transparent conductive film is one of the most promising materials to replace ITO thin film due to its flexibility,good conductivity and light transmission.In this work,aluminum doped zinc oxide?AZO?/Ag/aluminum doped zinc oxide?AZO?multilayer film was grown by magnetron sputtering.In addition,in this process,we enhance the surface energy and the adhesion force of the bottom AZO by oxygen plasma treatment which in turn result in an uniform thin Ag layer,and study the influence of the electro-optical properties and the low radiation effect of multilayer film by oxygen plasma treatment.The main research contents include:1?We prepared smooth and uniform thin Ag layer by oxygen plasma treating bottom AZO,which is critical for excellent transparent metal interlayer conductive film.By contact angle test and AFM measurements,we found that the AZO surface containing a large amount of oxygen functional groups after oxygen plasma treatment.This property enlarges the surface energy of AZO,and can induce the formation of Ag along the plain,decrease the critical thickness of the continuous Ag film and its surface roughness.2?According to the induced transmission theory,we optimized the thicknesses of each layer in AZO/Ag/AZO transparent conductive film and designed experiments to demonstrate the thickness influence of Ag layer and upper AZO layer.The result shows that oxygen plasma treated bottom AZO can decrease the critical thickness of Ag layer.Thinner Ag layer can increase the visible light transmittance and electrical conductivity and then maximize the quality factor.In the end,we obtained a AZO/Ag/AZO transparent conductive film that exhibited a transmittance of 93.2%at 550 nm,at a resistivity of 3.73×10-5?·cm.3?We studied the Low-E property,flexibility and heating property of AZO/Ag/AZO films.Oxygen plasma treated AZO can increase the visible light transmittance and obtain a smaller shading coefficient of a high infrared reflectivity AZO/Ag/AZO film.In addition,the film shows good flexibility because the sheet resistance of the film on PET substrate shows no change after 1000 times bending.Compare with ITO,AZO/Ag/AZO performs a better thermal conductivity.Thus,AZO/Ag/AZO is able to achieve high temperature under low voltage and shows an excellent electrical heating performance. |
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