Research On Key Techniques Of Angle Error Measurement Based On Combined Surface Reference

CNC machine tool as the national equipment manufacturing industry of machine tools,the level of production capacity and reflect the country’s technical and economic comprehensive ability."Made in China" 2025 proposed to accelerate the development of high-end CNC machine tools and other cutting-edge technology and equipment,in order to enhance reliability,precision maintenance as the focus,the development of high-end CNC system.It is an urgent problem to realize the efficient and high-precision detection and compensation of machine tool geometric errors.21 geometric errors of three axis machine tool,including straightness error,positioning error and angle error,the verticality error,aiming at the problems of machine tool geometric error detection process cumbersome,large volume of equipment,the research group proposed an error detection method of combination type machine tool based on reference element,this paper focuses on the measurement of angle error the analysis and research contents are as follows:1.According to the traditional method of measuring laser interferometer mirrors adjustment is time-consuming and expensive equipment,proposed a method for simultaneous measurement of multiple axis motion parameters based on L type reference plane and the combination of a rotating paraboloid.This method is based on the angle measurement,parameter identification according to the need of machine tool geometric error,the relation model of angle error,displacement and Perpendicularity Error and angle measurement are established,the new theoretical basis for machine tool geometric error detection.2.Angle measurement is the research objective of this paper.According to the characteristics of the reference surface,a small angle measuring system for measuring light beam is proposed and designed.According to the design parameters of rotating paraboloid and plane combination type datum,measure the beam diameter at the micron level,the prototype design of the size of 27mm*50mm*180mm,realizes the miniaturization design of angle measurement.At the same time,the ZEMAX simulation of the designed system is completed,and the correctness of the measurement principle is verified.3.In view of the characteristics of the imaging spot in the angle measuring system,a method of spot center location suitable for this subject is proposed.Based on the centroid method and Gauss fitting method,the stability and accuracy of the spot center coordinates under different algorithms are experimentally analyzed,and the rationality of the method proposed in this paper is verified.The method of its positioning accuracy within 0.66μm,according to the receiver pixel size of 2.2μm×2.2μm and the focal length of the lens f=100mm algorithm’s angle measurement precision is 0.7 ",it can be applied to the measurement accuracy of less demanding occasions.4.According to the design of two-dimensional angle measurement system,design and complete the calibration and calibration experiment of L type reference angle measurement system,and based on the 3D displacement measurement platform completed the experiment of measuring motion axis two-dimensional angle,and high precision laser interferometer phase ratio,pitching axis angle error and yaw error is less than ±2 ",meeting the design requirements.