Research On Model Identification And Control Algorithm Of Nano-Positioning And Scanning Platform

Nano positioning technology is a key technology in the fields of frontier science and engineering technology.Nano positioning technology is usually to be achieved with the form of nano positioning and scanning platform control system.For the nano positioning and scanning platform control system,due to its inherent hysteresis,creep,load and other characteristics,directly affect the positioning of nano positioning and scanning platform accuracy.Aiming at the design and simulation of nano-positioning and scanning platform,the modeling,parameter identification and control algorithm are studied.The main work as follows:(1)Introduction Nano positioning and scanning platform is widely used in many tip areas.This paper describes the significance of research on nano positioning and scanning platform and its control system.This thesis states the research significance and development status of nano positioning and scanning platform and its control system.And it shows the necessity that our country strives to develop the Nano positioning technology.(2)The structure,hysteresis,temperature,non-linearity and load characteristics of nano positioning and scanning platform are introduced.Introduce the mathematical analysis of mathematical modeling,test mathematical modeling and a combination of mathematical modeling.Description Based on the Bouc-wen model for nano positioning and scanning platform for mathematical modeling.Based on the theoretical knowledge of mechanism analysis and test method,the mathematical model of the hysteresis of the nano positioning and scanning platform is established precisely and the asymmetry of its existence is improved.(3)This paper introduces the parameter identification of nano positioning and scanning platform model.Firstly,the history and principle of identification are introduced briefly.Secondly,the error criteria and steps of model identification are described.The least squares method can be used to identify parameters because of its simple principle,few parameters,easy to solve,easy to implement,and no need to use mathematical statistics in the process of using,or even other methods can not be identified.Therefore,the least squares method becomes the main method of model parameter identification.In this paper,based on the least squares method to identify the unknown parameters of the model and the interests of the MATLAB compiler environment simulation.(4)The control methods of nano positioning and scanning platform were studied.First of all,in terms of control,a brief introduction to open-loop control and closed-loop control of the principles and characteristics.Secondly,in the aspect of the control algorithm,the principle of the traditional PID control algorithm and the digital PID control algorithm,as well as the optimization of the PID control algorithm and the composite control of the hysteresis compensation and the PI feedback are introduced,and the traditional PID control is observed.Ideal and interference in the case of nano positioning rain control platform for the control effect.(5)In this paper,under the environment of MATLAB compilation,the simulation and comparison of the model and improvement of nano positioning and scanning platform are made.In the control algorithm,the simulation and comparison of the traditional PID control algorithm,the optimized PID control algorithm and the compound control algorithm of hysteresis compensation and PI feedback in this paper are carried out for the nano positioning and scanning platform.The simulation results show that the modified model is closer to the actual measurement values of the nano positioning and scanning platform,and the composite control algorithm is more helpful to improve the fastness and accuracy of the positioning of the nano positioning and scanning platform,and can make the control volume reach nano scale.In summary,In this paper,we mainly study the identification and control algorithm of nano positioning and scanning platform.The experimental results show the feasibility of the proposed model and algorithm,and ensure the positioning accuracy of the system effectively.