| The research of amorphous alloys has made great progress in recent years,and many scholars at home and abroad have conducted related research.In this dissertation,the copper-zirconium-based amorphous alloy thin films were investigated.The amorphous formation ability,structural characteristics and mechanical properties of the films were investigated.Because of the reasons for the production of magnetron sputtering targets,we chose Cu50Zr50 as the study object,because the amorphous alloy is long-range disorder,that is,its structure is uniform from the macroscopic point of view,in order to explain the structural change and performance of the material The relationship,we introduce the concept of the interface.When preparing materials under normal temperature environment,we mainly studied the effects of various parameters under different chamber pressures on the rate and structure of amorphous alloys;in terms of mechanical properties,our group proposed to regulate the volume fraction of the interface by adjusting the volume fraction of the interface.The mechanical properties of amorphous alloys;The temperature of the substrate is increased when the film is prepared,and the effect of substrate temperature on the structure and properties of the film is investigated.These further studies on the structure and properties of amorphous alloy films are of great significance.The main research work and related conclusions of this paper are as follows:(1)Study the effect of different chamber pressure on the structure and properties of the film.The experimental results show that when the pressure in the chamber changes from 0.1 to 2 Pa,the deposition rate of the film is the fastest at 0.5 Pa.As the chamber pressure becomes larger or smaller,the deposition rate decreases,and the pressure is 0.1 to 0.5.When the variation between Pa changes,the rate of change is more severe;X-ray diffraction results show that: there is a clear "Tau Tau peak" exists,so the film can be determined to be amorphous;transmission electron microscopy results show that: there is a clear halo,further It was confirmed that the film was amorphous.The scanning electron microscopy showed that the cross-section of the film showed a columnar structure,which also illustrated its growth mode.As the pressure in the chamber gradually increased,the "amorphous particle" size of the film sample gradually decreased.The mechanical properties of the film were obtained by nanoindentation experiments.The results show that the hardness decreases gradually when the chamber pressure increases from 0.1Pa to 2Pa.In addition,the results of the bending deformation show that the cracks on the film surface are under tensile stress.Under the influence of the interface,and the cracks mainly occur at the boundaries of the largest "amorphous grains";this change indicates that With the increase of grain boundary volume fraction,the hardness of Cu50Zr50 amorphous alloy films decreases and the plasticity increases.(2)Study the effect of different substrate temperature on the structure and properties of the film.The experimental results show that the substrate temperature has no obvious effect on the deposition rate of the film,and the deposition rate is slightly slower than that at room temperature.The results of scanning electron microscopy and atomic force microscopy show that with the increase of temperature,the film is "amorphous." The size gradually increased;the scanning electron micrograph of the cross-section of the film was found to show a columnar structure,which also demonstrated the growth mode of the film;the mechanical properties of the film were obtained by the nanoindentation test,and the results showed that with the substrate temperature gradually As the film thickness increases,the hardness of the film increases.This result is also consistent with the inverse Hall-Petch relationship.When the “grain” size of the material is gradually reduced,the hardness of the film gradually decreases,and the plasticity gradually increases. |
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