Ultrasonic Bonding Of Polycarbonate Microfluidic Chip Based On Microenergy Array

Due to its high-throughput,high integration,low consumption and low pollution,microfluidic chips have important application prospects and commercial value in biomedical and molecular diagnostic fields.The production process of the microfluidic chip is mainly divided into the pattern manufacturing of the microfluidic chip substrate and the bonding between the microfluidic chip substrate and the cover sheet.Compared with the graphics production of the microfluidic chip,the low efficiency of the microfluidic chip bonding has become a bottleneck for limiting the large-scale production and commercial application of microfluidic chips for a long time.In this subject,we compare a large number of bonding methods,and believe that high-efficiency,low-cost,ultrasonic bonding without introducing other substances is relatively more conducive to the large-scale production and large-scale production of microfluidic chips.In order to solve the problem of the large-scale production of microfluidic chips,based on the flexibility of the micro-nano processing method,the key structure energy-director in the micro-fluidic chip are extended and optimized.A microenergy array with self-protection,self-alignment,and and better mechanical distribution has been designed.Utilizing the characteristics of mask defects that are easy to appear in high-depth dry etching,the rectangular,triangular and semicircular design ranges of traditional energy-director are expanded,and the isotropic trapezoidal energy-director are innovatively proposed.The concept of such a energy-director can effectively avoid the disadvantage of low bonding efficiency of the triangular energy-director,and at the same time has higher production efficiency than the semicircular energy-director.Combined with the self-designed microenergy array,this paper explores the influence of ultrasonic bonding parameters,and the effects of bonding amplitude,bonding pressure and bonding energy input on bonding strength,sealing property and microstructure deformation.It provides a reference for improving the bonding quality in a more general and wider application.Based on the above experimental results of micro-energy array and ultrasonic bonding parameters,polycarbonate was used as the material.This paper improved the biocompatibility and chemical compatibility caused by the introduction of solvent in the IPA solvent-assisted bonding experiment,and achieved low parameters bonding.In addition,this paper proposes and implements a lowparameter ultrasonic bonding of plasma-assisted ultrasonic bonding and UV surface modification bonding,and good joints are obtained.These two kinds of auxiliary methods require lower surface flatness and can effectively improve consistency in industrial applications.Based on the general trend of microfluidic chip development from two-dimensional to three-dimensional,this paper analyzes and considers the bonding method of multi-layer bonding,and proposes that the upper three layers are micro-energy arrays,and the lower two layers are micro-energy-director is bonded to the solvent in a comprehensive manner.From the bonding results,a better bond joint can be obtained,the energy loss increases from top to bottom,the microchannel deformation becomes smaller,and the auxiliary effect of solvent bonding becomes better at the position closer to the IPA activation temperature.