Fabrication Of Flexible Pressure Sensitive Film Material And The Development Of The Array Pressure Sensor

With the development of the intelligent technology and the Internet of Things（IoT）,flexible pressure sensors have a broader market as the core components of wearable electronic device and electronic skin（E-skin）.The research in flexible pressure sensors had developed from exploring conductive polymer materials with piezo-resistive performance to fabricating flexible pressure sensor with high performance.Some innovative researches have been conducted in the materials,structures and device designs of the sensors to obtain high performance flexible pressure sensor.Nowadays,some low-cost flexible pressure sensors with high-performance based on new materials and structures have been developed,and applied in wearable sensors,electronic skin and industry fields.However,exploring a flexible pressure sensor with high sensitivity,wide pressure measurement range,fast response time,and other high performance by a low cost,simple and efficient preparation process is still a challenge of the flexible pressure sensor research.To satisfy the requirements of flexible thin film pressure sensors with high performance and easy fabrication,the following work has been carried out in this thesis:1.By investigating the piezoresitive sensitivity of TPU（thermoplastic polyurethane）/CB（carbon black）composite conductive polymer composite and its screen printing process,on the basis a flexible film pressure sensor with periodic surface microstructures was fabricated by simple and efficient screen printing process.The sensing mechanism of the sensor were also investigated.2.The performance of the flexible thin film pressure sensor prepared in this thesis was characterized.It was found that the pressure sensor has a wide range of pressure measurement（116 Pa-1.5 Mpa）,high sensitivity(5.205 kPa^-1 in the range of 0-100 kPa and 0.63 kPa^-1 in the pressure range of more than 1200 kPa),excellent response and good signal stability and durability.3.The application of this new flexible thin film pressure sensor in wearable electronics and intelligent detections was demonstrated.The sensor was used in wrist pulse signal detection,throat voice signal acquisition,vibration signal monitoring and clamping force measurements,demonstrating good application potential in intelligent robot,wearable electronic equipment,human bioinformatics detection,and abnormal vibration detection in engineering and other fields.4.Three types of 16×16 array flexible film pressure sensors with three different sensitive array structures were designed and fabricated.A suitable sensitive structure for the array sensor was determined.5.Based on an STM32 chip,an acquisition system including the hardware and software for the array sensor is designed and prepared,which was capable of obtaining pressure distribution.