Research On Nano-picosecond Double-pulse Laser Composite Processing Technology Of Si₃N₄ Ceramics

Silicon nitride ceramics can be used to enhance the performance of semi-conductors and other devices,of the which the pulse laser processing method is commonly used to manufacture the surface micro-structure,but the actual processing effect and efficiency of the laser limit the application of technology.With the development of laser micro-nano processing,compounding multiple types of lasers for processing is forming a new technical research direction,in which nanosecond and picosecond laser coupling processing is a new processing technology and has a broad application prospect,combining nanosecond and picosecond.The paper analyzes the double pulse energy coupling model of nanosecond and picosecond lasers and their interaction process with materials according to the corresponding laser characteristics,and studies the behavior of nano-picosecond double pulse laser ablation materials.First,the paper studies the energy transfer process of the interaction between nanosecond and picosecond single pulse lasers and silicon nitride ceramics,establishes the corresponding theoretical model and numerical simulation,revealing the evolution of physical properties of silicon nitride ceramics under single-second and picosecond single pulse laser irradiation,and analyzing the processing characteristics of different types of lasers.Subsequently,the paper proposes the coupling method of nanosecond and picosecond laser and establishes a corresponding double-pulse laser energy coupling model.The simulation explores the evolution law of the material’s optical thermal properties under the coupling of the nanosecond picosecond laser,and analyzes the mechanism of the picosecond pulse on the physical properties of silicon nitride ceramics,by comparing the change of physical properties of materials in the process of single nanosecond and picosecond single pulse laser ablation in the simulation results.The article contrasts and analyzes the differences between the simulation model and the experimental results by carrying out relevant ablation experiments,.Finally,on the basis of theoretical and simulation research,the paper adjusts the theoretical model and improves the simulation operation,studies the influence of key parameters on the erosion topography,and explores a reasonable way to utilize the energy of the nano-picosecond double pulse laser and complete high-quality and efficient etching of silicon nitride ceramics.