Fabrication And Detection Of Microstructure Based On Two-Photon Polymerization

With the development of electronic technology and functional microstructure processing technology,the preparation of microstructure is becoming miniaturized and functional.Various functional microstructures have been widely cited in medical,aerospace,mechanical and other fields.The various preparation methods of microstructure are endless.Among which the Femtosecond Laser Two-Photon Polymerization(TPP)technology has become a research hotspot at home and abroad,because of its high resolution,low thermal effect,high flexibility,and real realization of three-dimensional space processing.In this paper,three kinds of processes for the preparation of microstructure by femtosecond laser Two-photon polymerization was explored.A preparation of doped graphene microstructure based on femtosecond laser two-photon polymerization was studied.A method based on machine learning modification of traditional optical microscope was designed and applied to the detection of three-dimensional two-photon microstructure.The main works are as follows:1.A method for preparing large-area microstructures on non-horizontal surfaces was explored.The method was used to detect the coefficient of focus of three points in the preparation area,and the compensation of focus was obtained by software when preparing the large-area microstructures.By doing this way,Tiny Deformation Detection Grating was invented.A method for the twice preparation of two-photon microstructures was designed.By setting fixed mark point on the surface of the slides,the preparation of microstructures can focus to the same area quickly and accurately many times by fixing the mark points.A method was invented for making microelectrodes by twice coating.The success rate will be improved by changing the two-dimension mask pattern into three-dimension mask.The problem of traditional silver glue preparation is the silver glue not strong enough to hold micro-electrode pins,and this problem can be effectively solved by the twice coating method.2.A series of two-dimensional patterns were prepared after mixing water-soluble graphene materials and photoresists.By using Characterization of Raman Scattering Spectroscopy,it shows that the graphene materials were successfully doped into the microstructure.In addition,a series of "well-shaped" structures of pure photoresist and graphene-doped materials were prepared,and by using scanning electron microscopy,it indicates that the microstructure of doped graphene is more superior in structural uniformity and shrinkage than pure photoresist microstructure.This work provides a new idea for the work of graphene three-dimensional configuration.3.In order to facilitate the detection of 3D microstructure and optimize the process of the detection,deep learning technology and image processing technology were applied to opticalmicroscope.A microscope automatic searching and 3D reconstruction system was designed,and this system was based on computer-vision,machine learning and Python software programming controlling.The CMOS electronic eyepiece is used as the image acquisition side,and the main program control the Raspberry Pi module to process the image,and it also control the servo motor to adjust the observation area.Finally,the image data is saved to the Num Py arrays,and the three-dimensional reconstruction is performed by retrieving the microstructure image data at different heights.This work combines artificial intelligence algorithms with traditional experimental equipment to achieve better experimental results.