| Modern gas detection in commercial, industrial, and medical applications all necessitate the use of precise and accurate sensors. Nanowire gas sensor arrays engineered by dielectrophoresis potentially offer highly sensitive gas detection with massively parallel fabrication. TiO2/TiO x nanowires were synthesized by the Vapor-Liquid-Solid (VLS) growth mechanism. SEM images revealed nanowire dimensions of 80-100 nm in diameter and several microns in length. Elemental composition and crystal lattice structure were confirmed by XPS and AES, and XRD and TEM, respectively. Dielectrophoresis was performed on gold and zinc oxide (ZnO) nanowires. Both materials were successfully assembled onto electrode arrays, with the single nanowire assembly of gold nanowires and multiple nanowire assembly of zinc oxide. |