Micro-motion Measurement Method And Technique Of Microscopic Objects

In recent years,nanotechnology,Micro-Electro-Mechanical Systems(MEMS),Micro-Opto-Electro-Mechanical Systems(MOEMS),microscopic observation technology and micro/nano technology have developed dramatically.In these areas,the micro-motion measurement of microscopic objects such as MEMS microactuators,micro/nano manipulators,micro/nano scanners,micro-organism,etc.,is required.However,most of the traditional measurement methods such as laser doppler measurement method,grating ruler measurement method,inductive micrometer technology,capacitance micrometer technology,etc.,may have disadvantages such as can only measure in one dimension,have to contact with the microscopic objects and so on.Therefore,research on new method of micro/nano motion is necessary and urgent,the research have both scientific research significance and widespread practical value in above areas.This thesis develops a new method and technology of measurement on the micro/nano motion of microscopic targets.Based on the theoretical analysis and method research,a micro/nano motion measurement system is established;on the basis of the system,the micro/nano motion of microscopic targets such as optothermal microactuator,atomic force microscope probe actuated by piezoelectric ceramics,capillary probe actuated by step-motor electronic moving platform,micro-organism,etc.,are measured without damage;new theoretical method of pixel fitting and sub-pixel fitting is proposed.Finally,a mature,practical measurement method with considerable research and practical value is developed.The main content and research outcome of this thesis are shown as follows:A new measurement method and technology on the micro/nano movement of microscopic targets has been proposed and studied,and the feature region chasing based pixel fitting algorithm proposed;combining this algorithm with the microscopic observation and sub-pixel fitting,the micro/nano measurement of various of microscopic targets are measured under time axis and spatial axis.The microscopic measurement technology is studied and the related measurement system is established.This system added the laser splitting module on the basis of the microscopic observation module,video capture and processing module and two-dimension step-control module,which makes the optothermal microacutator can be observed and measure by the system.Moreover,the control module of optothermal microacutator and atomic force microscope probe actuated by piezoelectric ceramics is established.Based on the proposed feature region chasing based pixel fitting algorithm and the sub-pixel algorithm,the micro/nano motion measurement software system is programmed using C++(MFC).This software has the function of measuring the time axis displacement,velocity,speed,acceleration,and the real time/non-real time spatial axis moving trail individually or simultaneously,and it can largely reduce the calculation quantities of pixel fitting and sub-pixel fitting,for improving the measurement velocity and efficiency.Based on the method and system mentioned above,micro/nano motion measurement experiments are carried out,the measurements(including time axis and spatial axis measurement and analysis)of micro/nano motion of optothermal microactuators,atomic force microscope probe actuated by piezoelectric ceramics,capillary probe actuated by step-motor electronic moving platform and micro-organisms are realized.The result of experiments and study shows that this micro/nano motion measurement system can dynamically test different types of microscopic targets in both time axis and spatial axis,and its advantages of universality,real time performance and convenience make it a technology that has wide research and application prospect.