RF-PECVD Fabrication Of Hydrogen-containing Multilayer DLC Films On Copper Substrates And Their Mechanical Properties And Corrosion Resistance

Diamond-like carbon film is a kind of metastable amorphous carbon film that has emerged in recent years.It exists with sp²and sp³hybrid bonds.It also has the excellent characteristics of graphite and diamond and has huge application prospects.This paper aims to prepare a diamond-like film layer with a 0.025cm pure copper foil,so that the performance of pure copper metal under various friction conditions,acid-base or neutral solution conditions can be improved,and it can be used in more fields.In this paper,a radio frequency plasma-enhanced chemical vapor deposition system（RF-PECVD）was used to prepare diamond-like carbon films.At the beginning of the experiment,using plasma-enhanced vapor deposition（RF-PECVD）to prepare diamond-like carbon films（DLC）,using methane gas as carbon source,H₂is used as the working gas to participate in the reaction throughout the whole process,and the experimental data such as different gas flow ratio,deposition time,total gas flow,radio frequency power,etc.are explored for the hardness,elastic modulus,anti-friction and wear resistance,and corrosion resistance of the film after growth.The impact of ability.Characterization methods such as SEM,EDS,XRD,AFM,and Raman spectroscopy were used to characterize and analyze the crystal lattice defects,surface morphology,and number of film layers of the film samples,and the best process parameters were obtained through comparative analysis,and copper foil was used as The growth substrate successfully prepared diamond-like carbon films under the process parameters.A Vickers microhardness tester is used to test the hardness of the diamond-like carbon film,an electrochemical test system is used to test the corrosion resistance of the diamond-like carbon film,and a rotating friction tester is used to determine the antifriction and wear resistance of the diamond-like carbon film.In the later stage of the experiment,the single factor variable experiment method was used to study the influence orientation of different process parameters on the corrosion resistance,abrasion resistance,elastic modulus and hardness of the film,and to understand the mechanism of action.Research shows:（1）The PECVD method can successfully prepare diamond-like carbon films based on the RF-PECVD 400 equipment.（2）Samples were prepared by single factor method,and rotating friction experiments were carried out on samples with variable radio frequency power,variable gas flow ratio,variable total gas flow,and variable growth time.The average friction coefficient was compared,and the best process parameters were obtained.The radio frequency power was 200w.When the gas flow ratio is 20:30 sccm and the growth time is 30 minutes,the diamond-like carbon film prepared under this condition has the best anti-friction and wear resistance performance,and the lowest average friction coefficient can reach 0.09.（3）Comparative analysis shows that the degree of importance that affects the forming quality of diamond-like carbon films is:RF power>gas flow ratio>total gas flow>growth time.（4）Compared with pure copper metal,the corrosion potential of the diamond-like carbon film coating samples prepared under different radio frequency power,gas flow ratio,total gas flow,and growth time all shifted to the right,indicating that the diamond-like carbon film The coating has a protective effect on the pure copper metal foil.Under the best process parameters,the corrosion potential is the highest,which is-176m V.Is it positively moved relative to the pure copper metal 63m V,the diamond-like carbon film has the best corrosion resistance.