Research On Clamping Technology Of Microassembly System

With the development and improvement of micro-fabrication technology,microelectromechanical products such as non-silicon MEMS fuzes,quartz flexible accelerometers,micro motors,MEMS pressure sensors are constantly developing towards miniaturization,integration and complexity.The assembly of MEMS products needs to meet the requirements of high precision,high efficiency,miniaturization and high consistency.Therefore,it is of great significance to carry out the research on the automatic micro assembly technology for the micro parts of the microelectromechanical products and the development of the micro assembly system.Based on the basic research and technical reserves in the field of microassembly,the research group developed two sets of micro-assembly systems for non-silicon MEMS devices and quartz accelerometers based on the assembly requirements of microelectromechanical products.In this paper,as one part of the main research topics of microassembly system,the purpose is to achieve stable,reliable and non-destructive clamping of the assembly object by analyzing and researching the multi-fixture flexible clamping technology of the assembly object,and to accomplish the automatic microassembly in the microassembly system,to provide technical support and reserve for automatic microassembly of MEMS products.The main contents of this paper include the following aspects:(1)Based on the demand of MEMS,the research status of micro assembly technology at home and abroad is analyzed.The research status of micro part clamping technology at home and abroad is analyzed in detail,and the shortcomings of existing research are discussed.The source of the subject and the research content of this article are introduced.(2)The characteristics of non-silicon MEMS parts and quartz accelerometer components are analyzed,and the requirements for assembly system and clamping are summarized.The objectives and technical requirements of micro assembly are described,and the overall structure and overall structure of the micro assembly system for non-silicon MEMS devices and quartz accelerometers are introduced.The main functional modules in the micro assembly system are introduced.The micro gripping scheme is studied.The main function and technical route of the clamping technology are described.(3)The research on the micro gripping system of non-silicon MEMS parts is carried out.According to the existing assembly process,combining the characteristics of the parts and the function of the assembly system,the automatic assembly process of non-silicon MEMS parts is written.To meet the needs of micro assembly system,a micro gripping system for non-silicon MEMS parts assembly is designed,and the micro clamping system gas path is designed according to the function of micro gripper.(4)The study of micro clamping system for quartz accelerometer components is carried out.According to the requirement of the quartz accelerometer component,the assembly process and the clamp hoop process flow are written for the quartz accelerometer components.According to the assembly requirement of quartz accelerometer module,a micro gripping system for quartz accelerometer assembly is designed.Based on that,a gas path of micro gripping system is designed.(5)The research on the performance of microgripper is carried out and the assembly error of the assembly station is analyzed and calculated.The force analysis model of the nonsilicon MEMS part holding process is established.The finite element simulation and clamping and assembly experiments are carried out to verify the performance of the nonsilicon MEMS micro gripper.The performance of the pendulum component micro gripper is verified by the finite element simulation and the clamping experiment.According to the module configuration of the assembly position and the repetition positioning accuracy of the table,the assembly error is analyzed and calculated.