Research On Key Technology Of Microstructure In Three-Dimensional Elliptical Vibration-Assisted Cutting

Three-dimensional elliptical vibration cutting(Three-Dimensional Elliptical Vibration,3D-EVC)is regarded as a precision machining technology because of its periodic heat dissipation,intermittent cutting,multi-parameter adjustable and other processing characteristics,which is widely used in aerospace and civil industries.Processing of optical precision devices.However,the research mainly focuses on device design,processing performance and path planning,etc.There is little research on the model control of 3D EVC processing optical materials.A flexible control model is the key to the processing of complex target optical microstructures.Based on the non-resonant three-dimensional elliptical vibration cutting 3D EVC,a control model of sub-micron grating microstructure processing is established in this paper.The flexibility of the three-dimensional elliptical device and the adjustable vibration parameters The flexibility and the multi-selectivity of processing parameters provide target processing parameters for the target microstructure.The main research contents are as follows:First,the influence of tool size on the removal of trace material is analyzed,and the tool geometry model is established for PCD tools.A machining model with a pit array in the depth of cut is proposed,and the amount of material removed from the adjacent pit array model Make mathematical expressions.Based on the offset of the pit array,multi-direction induced pits orderly shifting is preliminarily established,and finally the pit shifting model is simulated and verified by MATLAB simulation software.Secondly,a regulation model for creating optical microstructures is proposed.The microstructure control model mainly includes: the pit array modulation model based on the cutting depth direction and the MATLAB simulation structure establish the linear relationship between the cutting parameters and vibration parameters and the pit offset,which is used to predict the required parameters of the target microstructure processing;Non-resonant piezoelectric parameters set the target grating,and established a multi-parameter controllable microstructure control model.The influence of path repetition rate,lateral feed,nominal cutting speed and vibration frequency in the model on machining was analyzed;The pit array is overlapped in different directions to induce a sub-micron-scale grating microstructure,and the diffraction effect of the target microstructure is predicted based on the theory of diffraction theory.Finally,a processing experiment platform and a diffraction inspection platform for N-EVC processing microstructures were built.Complete the on-line cutting sub-micron grating microstructure experiment and perform functional inspection of the processed surface microstructure.The ZYGO white light interferometer was used to conduct non-contact and non-destructive testing of the geometric morphology of the grating microstructure.In addition,the geometric accuracy and morphology of the microstructure were analyzed.Secondly,based on the diffraction effect,a diffraction detection platform is used to evaluate and analyze the diffraction quality and optical effects of the grating microstructure.The experimental results show that by changing the parameter combination of the modulation model,a grating-type microstructure(700 nm)with a near target width is created on the surface of the copper-aluminum material,and the accuracy errors are 2.28%and 6.85%,respectively.The average wavelength of diffracted near-red light is 764 nm,and the average accuracy error is 9.25% of the grating type microstructure.The feasibility of inducing sub-micron grating microstructures based on N-EVC is verified,and a flexible control model is provided for the creation of a variety of complex microstructures.