Research On Preparation And Electrical Properties Of PZT Piezoelectric Coating Based On Vacuum Cold Spray Technology

Lead zirconate titanate（PZT）piezoelectric ceramic material is a perovskite structure compound composed of three elements of lead（Pb）,titanium（Ti）and zirconium（Zr）.The material has excellent piezoelectric properties,ferroelectric Performance and dielectric properties are widely used in various piezoelectric and ferroelectric devices.In this paper,in response to the high requirements for the preparation of piezoelectric ceramic coatings on the surface in complex environments,vacuum cold spraying technology is used to prepare PZT piezoelectric coatings on the surface of stainless steel substrates,and through process optimization and post-processing techniques,the electrical properties of PZT piezoelectric coatings are improved.performance.The specific research content is as follows:（1）Preparation of PZT coating and optimization of process parameters.The PM100L planetary ball mill was used to grind the PZT powder,and the Mastersizer 2000 laser particle size analyzer was used to analyze the particle size of the PZT powder after the ball mill;the orthogonal test was designed to obtain the best spraying process parameter of the PZT coating:main air flow 2.5 L/min,secondary air flow（powder）0.5 L/min,spraying distance 8 mm.（2）The microstructure characterization and influencing factors of PZT coating.The changes of the PZT phase structure and the surface cross-sectional morphology of the powder with different pretreatment parameters,different heat treatment temperatures and when the coating changes.The results showed that the PZT powder and coating did not undergo a crystalline phase structure transformation after pretreatment,and the powder showed a typical perovskite structure;the Pb element valence state in the PZT coating was Pb²⁺,and the element had no valence state change.With the increase of the heat treatment temperature,the particle size of the powder increases and agglomerates,the surface of the coating is smooth,and the structure is dense.（3）PZT coating electrical performance analysis and influencing factors.The changes of ferroelectric properties,piezoelectric properties and dielectric properties of PZT coatings are analyzed when different powder pretreatment parameters,different heat treatment temperatures and coating thicknesses change.The results show that the maximum residual polarization strength P_r of the PZT coating can reach 5.74μC/cm²;the piezoelectric coefficient d₃₃ of the PZT coating reaches the maximum 47 p C/N;the Curie temperature Tc of the PZT coating is about 370℃～400℃.