Analysis And Application Of Micromanipulation Performance Based On Liquid-droplet Manipulator

With the development of micro-electromechanical systems(MEMS),higher requirements are placed on micro-assembly technology.The picking,posture adjustment and release of micro parts are important parts in micro-assembly,and also the key to realize micro-assembly automation.Researching the operating performance of the droplet manipulator and exploring precise,reliable and effective micro-operation methods such as picking,posture adjustment,and releasing have important theoretical significance and application value.The paper analyzes the typical micro-manipulation process and mechanism of the droplet manipulator's picking,posture adjustment,and release,discusses the factors that affect the performance of the droplet manipulator.It establishes a liquid bridge force model for the micromanipulation process of the droplet manipulator,and analyzes the effect of the volume and height of the liquid bridge on the liquid bridge force.A release method based on the change of the shape of the liquid bridge is proposed.A dynamic model of the droplet manipulator is established,and the micro-manipulation process under different conditions is simulated and analyzed.A self-calibrating droplet manipulator structure and the self-calibration micromanipulation method are proposed.Based on the above research,a large number of experiments have verified the correctness of the theory and simulation model and the feasibility of the proposed method.The research and experimental results show that the liquid bridge force can be controlled by adjusting the height and the volume of the liquid bridge and the shape of the liquid bridge can be adjusted to realize the adsorption,release and posture adjustment of the tiny objects.The asymmetric liquid bridge system is unstable,which produces the force driving the liquid bridge to transform into a symmetrical liquid bridge.The internal driving force of a small object following the change of the tip attitude of the manipulator is the liquid bridge force.The simulation results of the micromanipulation performance basically agree with the experimental results,which proves the effectiveness of the droplet manipulator model.Matching the parameters of the droplet manipulator reasonably can improve the micromanipulation performance.Matching the shape of the corresponding droplet manipulator according to the shape of the operation target can realize the self-calibration of the position and posture.