Flexible Wearable Fabric-based Mechanical Sensors

With the rapid development of flexible electronics,people have put forward new requirements for the wearability,comfort,reliability and performance of flexible electronic devices.Electronic fabrics made by integrating a variety of functional electronic products on clothing are currently one of the key development directions of flexible electronic devices.Fabric-based sensors have attracted much attention due to their simple structure,light weight,good flexibility,comfortable wearing,and real-time acquisition and feedback of external signals.They can be widely used in emerging intelligent fields such as human-computer interaction,human health monitoring,and bionic robotics.Fabric-based mechanical sensors are one of the key units to realize intelligent and interactive applications.Therefore,the development of new fabric-based mechanical sensors with ultra-high sensitivity has important application value.In addition,flexible power devices can realize the power processing and control of sensing circuits,so the optimization of their material growth process and the research on fabric-based flexibility have also attracted people’s attention.This paper mainly studies flexible wearable fabric-based mechanical sensors,and the main innovative achievements are as follows:（1）The chemical electroless plating method for fabricating Ni electrodes on fabrics was developed,and a pressure sensor of double-layer fabrics was constructed.The device has electrical properties such as high pressure detection sensitivity(3.82×10⁶ k Pa^-1 at 0.39-4 k Pa),as well as good air permeability,which can meet the requirements of lightness and comfort.The 7×7 sensing array is constructed to realize the simultaneous and precise monitoring of the magnitude and position of the loading pressure.In addition,the output mode of pressure and frequency has been developed through the oscillatory circuit,which can simulate the neural information processing mode of touch.（2）A single-layer fabric tensile strain sensor was successfully fabricated by a double-sided electroless plating method.The device achieved excellent performances such as ultra-high sensitivity（1.06×10⁷ at 17.5%-27.5%strain）,high durability（>10000 cycles）,high mechanical compliance,high air permeability,and washability.Furthermore,the broad prospects of the device in emerging intelligent fields such as human joint motion monitoring,visible light communication,and human-computer interaction are explored.（3）Epitaxy was studied by various characterization methods such as X-ray photoelectron spectroscopy（XPS）,X-ray diffraction（XRD）and Raman Scattering Spectroscopy（RSS）.The effect of growth temperature on 3C-Si C thin films grown on 4H-Si C substrates.It is found that both too high and too low growth temperature will affect the crystalline quality of the samples.Among the four samples,the best growth temperature for the crystalline quality of the epitaxial layer is 1550℃.This can provide important reference value for the subsequent development of flexible fabric-based power devices.