Research On Health Index Extraction And Residual Lifetime Prediction Methods For Nano Positioning Stage

With the booming of nanotechnology,nano-manipulation systems,represented by nano positioning stages,have also developed rapidly,and their applications have expanded to include precision positioning,microscopic imaging,cell manipulation and many other fields.However,nano positioning stages are subject to cyclic loads that can degrade the performance of the system during long-term,repetitive work,and are affected by environments,which can affect the precision of the movement and eventually lead to reduced service lifetime.However,the reliability of nano positioning stages has been studied mainly from the perspective of material damage mechanics,which can provide fundamental basis for failure analysis of the performance degradation of nano positioning stage,but it is not advisable to apply it directly to the reliability of nano positioning stages at the system level.Therefore,a systematic study of the reliability assessment of nano positioning stages is urgently needed.In this paper,we take a piezo-driven nano positioning stage as the research target and carry out work on the extraction of performance degradation parameters,system degradation modeling and lifetime prediction in its reliability assessment study.Firstly,this paper selects piezoelectric driven nano positioning stage as a research object.Starting from its basic composition and structure,analyze and comprehensively consider the influence of multiple components;Combining Kirchhoff’s law,Newton’s kinematics law and piezoelectric effect,the dynamic modeling is completed by combining the mechanical part and electrical part of the nano positioning stage;Finally,based on the dynamic model,complete the extraction of performance degradation parameter indicators using the system parameters of the nano positioning stage as characterization information.Secondly,through in-depth analysis of the failure forms and determined system performance degradation parameters of nano positioning stage,and combining the representative volume unit theory and fatigue damage accumulation principle,this paper builds up a performance degradation model of nano positioning stage,and completes the determination of relevant parameters of the performance degradation model and system failure threshold,ultimately completing the lifetime prediction of nano positioning stage.At the same time,considering the expensive time and economic costs involved in conducting full life cycle experiments or accelerated experiments on nano positioning stage.Finite element analysis software is used to figure out fatigue life simulation in this paper,and takes two nano positioning stage experimental prototypes as examples to explain the specific process of fatigue life simulation and analysis,providing data support for subsequent experimental results.Finally,this paper selected two different piezoelectric driven nano positioning stage experimental prototypes,built a complete open loop motion experimental testing system for the nano positioning stage,and complete degradation data collection work.Based on this,this paper conducted research on online evaluation methods for the motion performance of nano positioning stage,achieving prediction of the remaining lifetime.In summary,this paper has completed the online evaluation of the motion performance and dynamic prediction of the remaining life of nano positioning stage,forming a systematic set of reliability evaluation theories and methods for nano positioning stage.This provides a data basis for achieving quantitative control or compensation of the nano positioning stage in the actual work process,and provides a necessary theoretical basis;The systematic extension of reliability theory to the field of nano stage is helpful in establishing new design methods for the maintenance and support of nano positioning stage.