Study On Control Method Of Hysteresis Compensation For Piezoelectric Ceramic Drive Platform

The development of modern science and technology,piezoelectric ceramic-driven micro-vibration isolation platform is widely used in aerospace technology,semiconductor chip manufacturing technology,micro and nano manufacturing technology and other high-tech,its development level determines the national high-precision equipment processing and testing accuracy,and China’s research level on piezoelectric ceramicdriven micro-vibration isolation platform compared with the international level still exists a large gap.Therefore,the study of piezoelectric ceramic-driven micro-vibration isolation platform is important to improve the national advanced manufacturing technology and narrow the gap between domestic and international.Based on the review of the development of the piezoelectric ceramic driven platform system and its control method,the theoretical analysis and experimental study of the hysteresis nonlinear modeling technology and control method of the piezoelectric ceramic driven platform are carried out.The main research contents of the thesis are as follows:First,the material properties of piezoelectric ceramic stacks are studied,the structural properties of piezoelectric ceramics are analyzed,the inherent hysteresis characteristics of the materials and their causes are emphasized,and the dynamic characteristics of piezoelectric ceramics are experimentally verified.The hysteresis nonlinearity leads to a complex multi-value mapping relationship between the input and output of the piezoelectric ceramic driving platform,which seriously affects the effectiveness of the system when controlling vibration.To address this phenomenon,this paper selects the Bouc-Wen model and the improved Bouc-Wen model as the hysteresis model of the piezoelectric ceramic drive platform,uses the least squares method and the Laplace transform to determine the model parameters,and verifies the effectiveness of the improved Bouc-Wen model through experiments to achieve the purpose of successful modeling of the system.Secondly,in order to improve the output accuracy of the piezoelectric ceramic drive platform,the fuzzy adaptive PID composite control scheme is proposed by analyzing the control principle of PID control algorithm,determining the parameters such as the affiliation function and fuzzy rectification rule,establishing the simulation model of the control system by applying Matlab software,adopting the step function and sinusoidal function as the response of the input signal system By comparing the actual output curve,the dynamic characteristics and error analysis of the control system are carried out.The simulation shows that the proposed fuzzy adaptive PID composite control scheme can reduce the influence of hysteresis on the output accuracy of the piezoelectric ceramic drive platform under different reference input signals and has better tracking performance.Finally,an experimental system based on the piezoelectric ceramic-driven microvibration isolation platform is built,and the system is subjected to performance test experiments and active-passive control experiments to further validate the proposed fuzzy adaptive composite control scheme.The analysis of the experimental results shows that the composite control method used in this paper achieves a micro-vibration signal attenuation of about 15%～22% within a fixed frequency of 50 Hz.