| The three-dimensional scanning probe is a key component that affects the measurement accuracy on the gear measurement center.In the precision measurement of the workpiece,the accuracy of the probe measurement affects the overall performance of the measuring instrument.Therefore,in-depth study of the performance of the probe and analysis of its law in the measurement process provide a basis for subsequent instrument measurement parameter optimization and error compensation.The research of this paper is mainly aimed at two kinds of three-dimensional scanning probes SP600 Q and SP80 H used by the gear measurement center.The linearity of the probe,the spatial single point detection error and the performance of the probe in the dynamic scanning process are analyzed through experimental research,and the rules are analyzed and summarized from the experimental results.Firstly,the experimental scheme of the linearity of the probe is developed.The linearity experiments of the three-dimensional scanning probe in various directions are carried out.The data are collected under different sampling intervals.The linearity deviation of the two threedimensional probes is analyzed by data,and the optimal measurement range of the probe is determined to be 100μm-300μm.Then according to the international standard ISO10360,the spatial detection error of the three-dimensional scanning probe is detected.The twenty-five points distributed in different spatial positions on the standard ball with a diameter of twenty-five mm are measured.The experiment is carried out under multiple indentations.The relationship between the indentation and the detection error is analyzed by the experimental results,and the experimental results are compared.Finally analyze the influencing factors of the probe in the dynamic scanning process.Taking roundness measurement as the research object,the roundness sampling scheme is designed,the sampling strategy is formulated,and the influence of starting position,measurement direction,measurement force and measurement speed on the measurement results is discussed.Through the analysis of experimental data,the influence law formula is summarized,and the measurement results are effectively compensated according to the summarized formula. |