Study On The Effect Of Deformation Of Grinding Tool And Workpiece On The Actual Grinding Depth In Cutting And Grinding

Ultra thin dicing blade cutting and grinding technology is widely used for cutting and grooving of electronic and optical devices.Relevant researches have been advancing in order to process high quality grooves.In this project,we study the radial deformation of ultra thin dicing blades and thermal deformation of workpiece in cutting and grinding,and investigate the influence of the above deformation on the actual grinding depth to improve the dimensional machining accuracy of groove depth.Based on the single abrasive grinding force model,the force model of ultra thin dicing blades during cutting and grinding was established.The grinding heat source and heat dissipation during cutting and grinding of ultra thin dicing blades were analyzed,and the heat source model of ultra thin dicing blades was established.Based on the triangular moving heat source model,the heat transfer model of the cutting and grinding process was established.According to the established model,the Mises stress field,displacement field and temperature field of the ultra thin dicing blade and workpiece under different grinding parameters(blade speed,workpiece feed speed and grinding depth)were obtained by finite element simulation.The results show that the deviation value of the grinding depth caused by the radial deformation of the ultra thin dicing blade is equal to the difference between the radial deformation at the lowest point of the ultra thin dicing blade for tool alignment and steady grinding,and the rotational speed and grinding depth are the main influencing factors with the deviation amount up to 5.799μm(rotational speed at18000r/min,feed speed at 1000mm/min and grinding depth at 0.12mm).The type of thermal deformation of the workpiece is elastic expansion deformation,resulting in the actual grinding depth being greater than the set grinding depth.The grinding depth deviation value is the amount of thermal deformation at the first end of the contact arc in the grinding depth direction.The deviation value increases with the increase of speed,feed rate and grinding depth.However,the small coefficient of thermal expansion and the low grinding temperature result in extremely low thermal deformation of the quartz glass workpiece.The actual grinding depth in cutting and grinding was investigated by cutting and grinding experiments of soda lime glass,and the accuracy of finite element simulation was verified.The experimental results show that the deviations of the grinding depth are generally around 10μm,and the use of a small outer diameter cutting disc at the same speed is beneficial to obtain a higher precision groove in the grinding depth dimension.The results of this study are consistent with the results of radial deformation of ultrathin cutting blades under existing idling(considering only centrifugal force)and the theoretical model of actual grinding depth established by existing studies,and further indepth study of the deformation of ultrathin cutting blades and workpieces during grinding to determine the amount of deformation will provide data reference for deformation compensation and help improve the dimensional machining accuracy of workpieces,which has significant engineering practical significance.