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Keyword [Silicon-Based Films]
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1. Studies On Properties And Mechanism Of Silicon-Based Films Deposited By CVD
2. The Investigation On Preparation Of Porous Low Dielectric Silicon Based Films By Using Spin-on Deposition
3. Research On Structure And Property Of Si-Based Films Using Magnetron Sputtering
4. Study On The Optical Properties Of Rare-earth Doped Silicon-based Films Embedded Si-nc
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