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Keyword [Tuned Substrate]
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1. Characteristics Of The Tuned Substrate Self-bias In A RF Inductively Coupled Plasma
2. Numerical Studies On Tuned Substrate Self-bias In A Radio-frequency Inductively Coupled Plasma
3. The Effect Of Capacitive-coupling On Discharge Modes And Tuned Substrate Self-bias In A Radio-frequency Inductively Coupled Plasma
4. By Icp Tuned Substrate Bias Transition Hysteresis Phenomenon
5. Tuned Substrate Bias Rf Inductive Coupling Plasma Oscillations
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