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Keyword [inductively-coupled plasma source]
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1. The Plasma Properties In Inductively Coupled Plasma Source With Crossing Antenna
2. The Miniaturized Inductively Coupled Plasma Source And Its Characteristics
3. Research On Low-power Microwave Plasma
4. Two-Dimension Fluid Simulations Of Inductively Coupled Ar And Ar/O2 Discharges
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