Font Size: a A A
Keyword [plasma etching]
Result: 1 - 14 | Page: 1 of 1
1. Two-Dimensional Implicit PIC/MC Simulations For Radio-Frequency Capacitively Coupled Plasmas
2. Effect Of C:F Deposition On Etching Of SiCOH Low-k Films In CHF3 Dual-frequency Capacitively Coupled Plasma
3. Antireflection Film Of Pmma-based Micro-structure Of Polymer
4. Research Of Feature Profile Evolution During The Etching On SiO2in Radio-frequency Plasmas
5. Magnetoelectric Heating In An Microwave ECR Plasma
6. Study On CF4/Ar/O2Plasma Modified Fused Silica
7. Research On Molding Technology Of Diffractive Optical Element
8. The Experimental Study Of Low Pressure CCP By Optical Emission Spectroscopy Diagnostics
9. Multiscale Studies Of Influences Of Reactant Transport On Profile Evolution In Plasma Etching
10. Effect Of Diamond Surface Treatments On The Spin Coherence Of Shallow NV Centers
11. Plasma etching of dielectric materials using inductively and capacitively coupled fluorocarbon discharges: Mechanistic studies of the surface chemistry
12. High density plasma etching of magnetic devices
13. Study On Low Temperature Plasma Etching Technique Of Lobster-eye Lens
14. Study On Evolutions Of Plasma Etching Profiles Using Tailored Bias Voltage Waveforms In RF ICP
  <<First  <Prev  Next>  Last>>  Jump to