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Keyword [Anisotropic wet etching]
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1. Fabrication Of Oxide Film And Investigation Of Growth Mode Using Modified Si Substrate
2. The Character Research And Simulation Of Anisotropic Wet Etching Of Quartz
3. The Etching Structure Research For Quartz At-cut And BT-cut Based On The Maximum Positive Curvature Method
4. Microstructures Of Wet Etching Patterned Sapphire Substrate And Its Simulation Research
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