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Keyword [Chemical mechanical polishing]
Result: 161 - 180 | Page: 9 of 10
161. Chemical Mechanical Polishing of Germanium and Indium Phosphide for Microelectronic Applications
162. Multiscale modeling of the slurry flow and the material removal in chemical mechanical polishing
163. Novel slurry formulations and associated mechanisms for chemical mechanical polishing of polysilicon, silicon dioxide and silicon nitride films in microelectronic applications
164. A Study of the Colloidal Stability of Mixed Abrasive Slurries of Silica and Ceria Nanoparticles for Chemical Mechanical Polishing
165. Characterization of chemical interactions during chemical mechanical polishing (CMP) of copper
166. Classical molecular dynamics and ab initio simulations of chemical-mechanical polishing of amorphous silica
167. Study of interfacial interaction during chemical mechanical polishing (CMP) of dielectric silicon dioxide
168. Modeling of chemical mechanical polishing at multiple scales
169. Chemical mechanical polishing (CMP) of sapphire
170. Some chemical and electrochemical aspects of the chemical mechanical polishing of copper
171. Synthesis and characterization of nanoporous silicon dioxide particulate for low defectivity in low-k dielectric chemical mechanical polishing
172. Investigation of mechanical aspects of chemical mechanical polishing
173. An investigation into chemical-mechanical polishing process of zinc selenide
174. Investigation on Inter-layer Dielectric Processed by Chemical Mechanical Polishing and Spin-on Dielectric for Complementary Metal-oxide-semiconductor Compatible Device
175. Mechanism of dissolution and planarization of copper/tantalum films during chemical-mechanical polishing
176. Experiments and mechanistic models for the chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses
177. Fundamental studies on silicon dioxide chemical mechanical polishing
178. Mechanical interactions at the interface of chemical mechanical polishing
179. Mixed surfactant systems to control dispersion stability in severe environments for enhancing chemical mechanical polishing (CMP) of metal surfaces
180. Investigating fluid behavior beneath a wafer during chemical mechanical polishing processes
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