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Keyword [DRIE]
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1. Research Of Equipment Of Measuring Mechanical Properties Of MEMS Materials
2. Study On The Changes In Nutrition And Flavor Of Mackerel During Drie Process
3. Research On Deep Silicon Etching Technoligy Using An Ultra-low Cost Tool For Flexible,small Volume Manufacturing
4. Ionic liquid-mediated sol-gel sorbents for capillary microextraction and challenges in glass microfabrication
5. Research And Development Of High Performance Piezoresistive Pressure Sensor Using SON Technology
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