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Keyword [Gate dielectric materials]
Result: 1 - 3 | Page: 1 of 1
1.
Mechanical Property Characterization Of Hign-k Ultra-thin Nanofilms By In-situ Nanoindentation
2.
Reaction mechanisms in patterning hafnium-based metal oxide thin films in halogen-based plasma chemistries
3.
Synthesis, integration, and characterization of metal oxide films as alternative gate dielectric materials
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