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Keyword [H-platelets]
Result: 1 - 3 | Page: 1 of 1
1.
Helium And Hydrogen Ion Co-implantation Induced Surface Exfoliation In Si-based Materials And The Involved Mechanisms
2.
Study On Damage And Mechanism In Crystal Silicon Co-implanted With Boron And Light Gas Ions
3.
Study Of Damage In Crystal Silicon Induced By Nitrogen And Hydrogen Ion Implantation
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