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Keyword [Laser-induced backside wet etching]
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1. Study On Laser Induced Cavitation Bubbles And Flow Field Distribution During Laser-Induced Backside Wet Etching Sapphire Substrates
2. Study On Mechanism Of Laser Backside Wet Etching Sapphire Substrate Based On Metal Salt Solution
3. Micromachining of borosilicate glass and laser induced backside wet etching of quartz using an excimer laser (248 nm)
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