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Keyword [MEMS]
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1. Study On Key Technologies Of Micro Fluidic Chip Integrated With Micro Valveless Pump
2. Fundamental Research On UV-LIGA-Micro-EDM Technology
3. Characters Of Functionally Graded Piezoelectric Smart Beams And Their Applications
4. The Fabrication Of High-performance LIGA Mold Inserts For MEMS And Study Of The Demolding Properties
5. Research On The Key Technology Of Fabrication Of The Biomimetic Gecko Micro Adhesion Array And The Flexible Tactile Sensor
6. Research On The Theory And Equipment Of Micro Hot Embossing
7. Study On Complex 3-Dimensional Microstructure Machining On Metal Surface By Confined Etchant Layer Technique
8. Microstructure And Mechanical Property Of The Anodic Bonding Interface Between Solid Electrolyte Glass (Ceramics) And Metals
9. Study On Glass-ceramics Of Low-temperature Anodic Bonding For Application In MEMS
10. Investigations On Flexible Manipulation Methods For Micro/Nano Scale Objects
11. Investigation Of Coupled DSMC-SPH Multiscale Approach For The Micro Chemical Machinery
12. Study Of Mechanical Properties Of Micro-Scale Materials By Micro-Tensile System And Method
13. Lattice Dynamics Study On Thermal Properties Of Crystal Film In MEMS
14. Controllable Synthesis Of One-dimensional Nanomaterials Of Chalcogenides And Properties Study Of Related Nano-devices And MEMS
15. Three-dimensional Microfabrication On GaAs By Using Regular Patterns Molds By The Confined Etchant Layer Technique
16. Investigation Of The Glass-ceramics Used For Anodic Bonding Material In MEMS
17. Simulation Of Silicon Anisotropic Etching Using Cellular Automata Method
18. The Computer Micro-Simulation Of Silicon Crystal Anisotropic Etching
19. The Basic Study On The Combined Technology Of Ultrasonic Machining And Electrochemical Machining For Machining Micro-instruments
20. The Research Of Micro Gear Fabrication Using Quasi-LIGA Technology
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