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Keyword [MEMS devices]
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1. Development Of Ion Conductive Polymers For MEMS Devices By Anodic Bonding
2. A Study On Reliability Of Silicon Nitride For Space Applications In MEMS Devices
3. Development of polycrystalline and amorphous silicon carbide thin films for membrane-based MEMS devices
4. Interfacial adhesion for microelectronics and MEMS devices
5. Design, fabrication, and testing of novel three-dimensional electrochemical structures
6. Characterization of the mechanical properties of freestanding platinum thin films
7. Packaging of two-dimensional microelectromechanical systems (MEMS) variable capacitors with liquid crystal polymer
8. Materials Properties of Conducting Polymers PEDOT:PSS/PVA
9. Characterization of residual stress in microelectromechanical systems (MEMS) devices using Raman spectroscopy
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