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Keyword [Rapid thermal chemical vapor]
Result: 1 - 4 | Page: 1 of 1
1.
Temperature control and characterization of silicon-germanium growth by rapid thermal chemical vapor deposition
2.
The use of rapid thermal chemical vapor deposited oxynitrides for advanced gate dielectrics
3.
Rapid thermal chemical vapor deposited sidewall spacer dielectrics for deep submicron MOSFET technology
4.
Nucleation, epitaxial growth, and characterization of beta-silicon carbide thin films on silicon by rapid thermal chemical vapor deposition
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