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Keyword [SiCOH films]
Result: 1 - 5 | Page: 1 of 1
1.
Effect Of Annealing On Structures And Properties Of CH
4
-doped SiCOH Films
2.
Controlling Cu Diffusion In SiCOH Films By O
2
Plasma Treatment
3.
Preparation And Characterization Of Porous Sicoh Low Dielectric Constant Material Film
4.
Preparation And Characterization Of Low-dielectric Constant SiCOH And SiCOF Films
5.
Effect Of O
2
Flow Rate And Low-frequency Power On Etching Characteristics Of SiCOH Low-k Films
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