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Keyword [mechanical polishing]
Result: 181 - 200 | Page: 10 of 10
181.
Investigation of slurry systems in metal and dielectric chemical mechanical polishing
182.
Chemical-mechanical polishing of metal and dielectric films for microelectronic applications
183.
Macroscopic and microscopic modelling in chemical-mechanical polishing (CMP) process
184.
Chemical Mechanical Polishing of Germanium and Indium Phosphide for Microelectronic Applications
185.
Multiscale modeling of the slurry flow and the material removal in chemical mechanical polishing
186.
Novel slurry formulations and associated mechanisms for chemical mechanical polishing of polysilicon, silicon dioxide and silicon nitride films in microelectronic applications
187.
A Study of the Colloidal Stability of Mixed Abrasive Slurries of Silica and Ceria Nanoparticles for Chemical Mechanical Polishing
188.
Characterization of chemical interactions during chemical mechanical polishing (CMP) of copper
189.
Classical molecular dynamics and ab initio simulations of chemical-mechanical polishing of amorphous silica
190.
Study of interfacial interaction during chemical mechanical polishing (CMP) of dielectric silicon dioxide
191.
Modeling of chemical mechanical polishing at multiple scales
192.
Chemical mechanical polishing (CMP) of sapphire
193.
Some chemical and electrochemical aspects of the chemical mechanical polishing of copper
194.
Synthesis and characterization of nanoporous silicon dioxide particulate for low defectivity in low-k dielectric chemical mechanical polishing
195.
Investigation of mechanical aspects of chemical mechanical polishing
196.
An investigation into chemical-mechanical polishing process of zinc selenide
197.
Investigation on Inter-layer Dielectric Processed by Chemical Mechanical Polishing and Spin-on Dielectric for Complementary Metal-oxide-semiconductor Compatible Device
198.
Mechanism of dissolution and planarization of copper/tantalum films during chemical-mechanical polishing
199.
Experiments and mechanistic models for the chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses
200.
Fundamental studies on silicon dioxide chemical mechanical polishing
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