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Keyword [ta-C thin films]
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1. Preparation And Application Of AIN And Ta-C Thin Films For SOI Technology
2. Discharge Of Graphite Cathodic Arc With High Pulse Current And Structure And Properties Of Ta-C Thin Films
3. Electrical and Electrochemical Properties of Nitrogen-Containing Tetrahedral Amorphous Carbon (ta-C) Thin Films
4. Preparation Of Metal Carbide (W-C,Ta-C) Thin Films And Study On Their Microstructure And Electrical Properties
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