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Keyword [AlN thin films]
Result: 1 - 3 | Page: 1 of 1
1.
Preparation Of AlN Piezoelectric Thin Films And A Hinged Micromachined Piezoresistive High-g Accelerometer
2.
AlN Thin Films Deposited By MF Reactive Magnetron Sputtering
3.
Interpretation Technology Of Crystal Temperature Measurement For Aero-engine Turbine Blades
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