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Keyword [Electro-thermal actuator]
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1. The Mechanism Of Micro Photo-thermal Expansion And The New Method Of Photo-thermal Micro Actuator
2. A Study Of New-type Micro Electro-thermal Actuator
3. Rf Mems Switches, Horizontal Heat-driven Research
4. Design And Analysis Of MEMS Actuator In Fuse
5. Study Thermal-mechanical Coupled Properties Of Electro-thermal Actuator
6. Design And Driving Characteristics Of Electrothermal Micro-actuator For Optical Fiber Alignment
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