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Keyword [MEMS capacitive accelerometer]
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1. The Study Of Tri-axis Capactive Vector Hydrophone
2. Research Of Two-dimensional Vector Hydrophone's Miniaturization Construction Design And Manufacture
3. The Design And Manufacture Of The Tri-axis Capacitive Accelerometer Based On The Single Mass
4. System Modeling Of Digital Closed-loop Readout Circuit For MEMS Acceleration Sensor
5. MEMS Capacitive Accelerometer Signal Readout System
6. Integrated Design Of Capacitive Accelerometer Based On Wafer-level Packaging
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