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Keyword [Nanopositioning stage]
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1. A Construction Of The Six-DOF Calibration System Of Nanopositioning Stage Based On Laser Interferometer
2. Study On The Nanopositioning Stage With Millimeter Range Based On Pan-style Piezomotor
3. Motion Control Of Piezo-actuated XY Nanopositioning Stages For High-speed Raster Scanning
4. Design And Actuation Of A Long Stroke Air-levitated And Magnet-driven Nanopositioning Stage
5. Research On High Bandwidth Precision Positioning System Based On Compliant Mechanism
6. Design And Control Of 3-DOF Nanopositioning Stage
7. Design, characterization, and control of a high-bandwidth serial-kinematic nanopositioning stage for scanning probe microscopy applications
8. Drive And Control Of Large Range Nanopositioning Stage Based On Voice Coil Motor
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