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Keyword [diffraction wavefront]
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1. Machine-Ruling Grating’s Line Error And Its Correction Method
2. Analysis Of Optimization Of Optical Structural Parameters And Wavefront Error In Point Diffraction Interference System
3. Controller Design Of Microposition System In The Large Diffraction Grating Ruling Engine And Research On Correction Diffraction Wavefront
4. Study On The Mosaic Errors Judgment Of Holographic Grating Mask Based On Measurement Of The Diffraction Wavefront
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